Free-space optical MEMS

Abstract

Microelectromechanical systems (MEMS) technology enables the creation of micro-optical elements that are inherently suited to cost-effective manufacturability and scalability because the processes are derived from the very mature semiconductor microfabrication industry. The inherent advantages of applying microelectronics technology to silicon micromechanical devices, including optical MEMS, were presented in 1982 by Petersen in the now-classic paper, Silicon as a mechanical material. [1] The ability to steer or direct light is a key requirement for free-space optical systems. In the 20 years since Petersen's silicon scanner,[2] the field of optical MEMS has seen explosive growth.[3,4] In the 1980s and early 1990s, displays were the main driving force for the development of micromirror arrays. Portable digital displays are now commonplace, and head-mount displays are also commercially available. In the past decade, telecommunications have become the market driver for optical MEMS. The demand for routing ever-increasing Internet traffic through fiberoptic networks pushes the development of both digital and scanning micromirror systems for large port-count, all-optical switches. In the health care arena, scanning optical devices promise low-cost, optical cross-sectioning endoscopic microscopy for in vivo diagnostics. © 2006 Springer-Verlag Berlin Heidelberg.