Behavioural modelling and system-level simulation of micromechanical beam resonators

Abstract

This paper presents a behavioural modelling technique for micromechanical beam resonators that enables the simulation of MEMS resonator model in Analog Hardware Description Language (AHDL) format within a system-level circuit simulation. A 1.13 MHz clamped-clamped beam and a 10.4 MHz free-free beam resonators have been modelled into Verilog-A code and successfully simulated with Spectre in Cadence. Analysis has shown that both models behave well and their electrical characteristics are in agreement with the theory. © 2006 IOP Publishing Ltd.