Inkjet 3D Printed MEMS Electromagnetic Multi-Frequency Energy Harvester

Abstract

Multi-frequency operation is an interesting and desired feature of electromagnetic energy harvesters. This work presents results of investigations on an inkjet 3D-printed miniature multifrequency electromagnetic energy harvester. Vibrating microstructures utilizing springs with constant thickness (300 µm) and widths from 220 to 500 µm were designed, fabricated, and characterized as parts of the miniature energy harvester. Resonant frequencies of the microstructures were measured, and electrical parameters of the harvester were determined. The harvesters operated in the 85–185 Hz frequency range with 32 µW maximal output power. Thanks to flexibility in designing and fabrication by 3D printing, it was possible to develop an energy harvester with at least two operating frequencies within a single harvester structure in many possible two-frequency configurations.