Silicon micro-gyroscope closed-loop correction and frequency tuning control

Abstract

In this paper, we present the improved performance of silicon micro-gyroscope under closed-loop correction and frequency tuning. First, this paper analyzes the source of the quadrature error in the micro-gyroscope. Second, the mode-matching state of the silicon vibratory gyroscope is studied. The sense mode resonant frequency is tuned to be closed to the drive mode resonant frequency under the mode-matched condition. Then, the closed-loop system correction is realized under the mode-matched condition and the proportion-integral differential correction with a passive impedance network. Finally, the experiment results demonstrate the feasibility of the closed-loop system correction scheme under the mode-matched condition.