AFM studies of stiction properties of ultrathin polysilicon films

Abstract

The paper presents the analysis of the sticking properties of ultrathin polysilicon films and their correlation with the temperature (and resulted roughness) at which the film has been deposited. The force distance curves (FDC) has been done with an atomic force microscope (AFM). Temperature impacts roughness of the surface, which in turn influences adhesion of the sample. Study has been done for various humidities to find optimal parameters for deposition of the films. Additional properties of the samples such as wettability, roughness and mechanical parameters have been taken into consideration in the stiction studies.