Growth of diamond thin films by chemical vapour deposition

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Abstract

Deposition of diamond thin films on non-diamond substrates at low pressures (<760 torr) and low temperatures (<2000°C) by chemical vapour deposition (CVD) has been the subject of intense research in the last few years. The structural and the electrical properties of CVD diamond films grown on p-type 〈111〉 and high-resistivity (>100 kΩ-cm) 〈100〉 oriented silicon substrates by hot filament chemical vapour deposition technique are described in this review paper. © 1994 the Indian Academy of Sciences.

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APA

Kulkarni, A. K. (1994). Growth of diamond thin films by chemical vapour deposition. Bulletin of Materials Science, 17(7), 1379–1391. https://doi.org/10.1007/BF02747235

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