Introduction and overview BT - Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids

Behrisch, R. (1981). Introduction and overview BT  - Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids. In R. Behrisch (Ed.) (pp. 1–8). Springer Berlin Heidelberg.