Abstract
The co-integration of MEMS and CMOS technology is reviewed and the IC MEMS CAD tools SOLIDIS and ICMAT are outlined.
Cite
CITATION STYLE
APA
Baltes, H., & Haberli, A. (1997). CMOS MEMS. In Proceedings - IEEE International Symposium on Circuits and Systems (Vol. 4, pp. 2813–2816). IEEE. https://doi.org/10.1007/978-90-481-9751-4_100142
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