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Book Chapter

Ellipsometry and Correlation Measurements

  • Gajic R
  • Jakovljevic M
Springer Berlin Heidelberg, (2013), 669-703
DOI: 10.1007/978-3-642-33956-1_20
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Abstract

Ellipsometry, in general, is one of the most sensitive spectroscopic techniques nowadays in both macro- and nano-scale research. Advantages like absolute measurements (without need for references), high precision, non-destructive character, easy real-time monitoring...

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Gajic, R., & Jakovljevic, M. (2013). Ellipsometry and Correlation Measurements. In Ellipsometry at the Nanoscale (pp. 669–703). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-33956-1_20

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