The measurement of electrical properties of nanostructures with use of conductive diamond tip

Abstract

The use of doped full-diamond tips in SPM to measure electrical properties with nanoscale resolution is described. The method enables to measure electrical impedance, capacity and conductivity of semiconductors. The experimental results shows a wide range of benefits in investigation and creation of elements for micro and nano-electronics. According to multiple experiments, the characteristics of diamond tips are very stable during scanning, indenting and electrical measurements. © 2007 IOP Publishing Ltd.