Study of the parameters affecting ion beam emerging from cold conical cathode ion source

Abstract

The aim of this work is study of the parameters affecting ion beam emerging from cold conical cathode ion source. The input discharge and output ion beam characteristics have been measured at different pressures using nitrogen and argon gases. The optimum distance between the ion exit aperture of the cathode and the movable copper ion collector plate has been determined using nitrogen and argon gases. The ion collector plate has been placed at different distances from the ion exit aperture of the cathode equal to 2, 3, 4, 4.5, 5, 5.5 and 6 cm respectively. It is found that the optimum distance between the ion exit aperture of the cathode and the ion collector plate equals 5 cm for high output ion beam current. At this optimum distance, the efficiency of the ion source reaches 28.3% and 21.3% using nitrogen and argon gases respectively. The divergence angle of the ion beam exit from the cathode aperture has been determined for each distance by measuring the ion beam diameter which obtained on the ion collector plate. It is found that at the optimum distance between the ion exit aperture of the cathode and the ion collector plate, a minimum divergence angle of the ion beam emerging from the ion source equal to 1.140 and 2.290 using nitrogen and argon gases respectively. Also the aspect ratio of the ion source, the ratio between the radius of the ion exit aperture of the cathode to the distance between the ion exit aperture of the cathode and ion collector plate, has been determined.