A drastic increase in critical thickness for strained SiGe by growth on mesa-patterned Ge-on-Si

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Abstract

We demonstrate that the critical thickness for Ge-rich strained SiGe layers can be drastically increased by a factor of more then two by means of growth on mesa-patterned Ge-on-Si. The Si0.2Ge0.8 layer grown on sub-millimeter mesa Ge-on-Si is fully strained and free from ridge roughness, while the same Si0.2Ge0.8 layers grown on unpatterned Ge-on-Si and a Ge substrate are partially strain-relaxed with the surface covered by high-density ridge roughness. This demonstrates that the proposed patterning method can provide thick and stable strained SiGe films as promising templates for realization of strained SiGe-based optoelectronic and spintronic devices.

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Wagatsuma, Y., Alam, M. M., Okada, K., Yamada, M., Hamaya, K., & Sawano, K. (2021). A drastic increase in critical thickness for strained SiGe by growth on mesa-patterned Ge-on-Si. Applied Physics Express, 14(2). https://doi.org/10.35848/1882-0786/abd4c5

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