In this report we describe the preparation of metal oxide coated-carbon nanotubes (MeOx/CNTs) with a controlled thickness of the inorganic coating by a new atomic layer deposition (ALD) process based on non-aqueous sol-gel reactions. The as deposited films are amorphous and the coatings on the inside and outside the nanotube present a high conformality. The electrical and sensing properties of thin films of VOx-coated carbon nanotubes prepared by ALD have been investigated. The developed VOx/CNTs-based sensor devices show enhanced performance for NO2 monitoring compared to uncoated CNTs-based sensors. © 2010 Springer Science+Business Media B.V.
CITATION STYLE
Neri, G., Bonavita, A., Micali, G., Rizzo, G., Willinger, M. G., Rauwel, E., & Pinna, N. (2010). A novel approach for the preparation of metal oxide/CNTs composites for sensing applications. In Lecture Notes in Electrical Engineering (Vol. 54 LNEE, pp. 63–66). https://doi.org/10.1007/978-90-481-3606-3_9
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