Thick KNbO3 films deposited by ultrasonic-assisted hydrothermal method

Abstract

We succeeded in depositing a thick KNbO3 film using the ultrasonic-assisted hydrothermal method. The maximum film thickness was 156 mm, which was 5.2 times that without ultrasonic assistance. The optimized thickest film was obtained when the ultrasonic irradiation was carried out in the nucleation process but nor in the crystal growth process. One of our future works is to examine the piezoelectric properties of this film. The optimum energy of the ultrasonic power should also be clarified.