Assembly of zinc oxide nanostructures by dielectrophoresis for sensing devices

Abstract

Net-like nanostructures of ZnO were fabricated on photolithographically patterned Si/SiO2 and glass substrates by dielectrophoresis in ethanol medium. The SEM images show that the pore size of these nanostructures increases with the separation between the electrodes in the patterned substrates. The devices, fabricated starting from various substrates, show responses with variation in the relative humidity level due to the adsorption of water molecules on the surface of the ZnO nanostructures. © 2014 Springer Science+Business Media.