Metrology with synchrotron radiation

Abstract

Metrology with synchrotron radiation covers a wide range of tasks from radiometry to quantitative materials research. This chapter provides an overview of activities, methods and facilities in this field. In particular, the measurement capabilities of the Physikalisch-Technische Bundesanstalt (PTB) are presented with the storage rings BESSY II and MLS as primary source standards and cryogenic radiometers as primary detector standards. The applications relate to the characterization of space instruments and optics for EUV lithography, FEL photon diagnostics, nanometrology and material characterizations for semiconductor electronics, photovoltaics, energy storage, catalysis, or biotechnology.