Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications

Golderer, W., Lutz, M., Gerstenmeier, J., Marek, J., Maihöfer, B., Mahler, S., … Bischof, U. (1998). Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications. In Advanced Microsystems for Automotive Applications 98 (pp. 69–78). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-39696-4_6