CITATION STYLE
Lebrasseur, E., Pourciel, J.-B., Bourouina, T., Ozaki, M., Masuzawa, T., & Fujita, H. (2001). Microsystem for Vertical Profile Measurement of High Aspect-ratio Microstructures. In Transducers ’01 Eurosensors XV (pp. 1030–1033). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_243
Mendeley helps you to discover research relevant for your work.