Nanomanufacturing utilizes value-added processes to control materials structures, components, devices, and systems at the nanoscale for reproducible, commercial-scale production. It is the essential bridge between the discoveries of nanoscience and real-world nanotechnology products. In recent years, ion beam technology has found wide applications in nano precision or nanoscale manufacturing. Ion beam nanomanufacturing (IBNM) technologies mainly consist of four approaches: ion-induced imaging, ion milling removal, ion-induced deposition, and ion implantation or modification, which are usually performed under a stream of accelerated ions by electrical means. Versatile materials can be processed by IBNM, such as diamond, metals, thin films, polymers, and semiconductors.
CITATION STYLE
Fang, F. (2015). Introduction to nanomanufacturing using ion beam technology. In HandBook of Manufacturing Engineering and Technology (pp. 1277–1278). Springer-Verlag London Ltd. https://doi.org/10.1007/978-1-4471-4670-4_64
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