Charge-coupled CMOS and hybrid detector arrays

Abstract

Over a decade has passed since complementary metal oxide semiconductor (CMOS) imaging detectors made their moveinto the charge-coupled device (CCD) arena. Low cost, low power, on-chip system integration, high-speed operation andtolerance to high-energy radiation sources are unique features that make CMOS detectors popular. However, it remainsunclear if CMOS arrays can compete with the CCD in high performance applications (e.g., scientific). This papercompares fundamental p erformance p arameters c ommon t o b oth C MOS a nd CCD i magers, a nd 1 ists s pecificCMOSperformance deficiencies that prevent the technology from high end use. In this paper we will present custom CMOSpixel designs and related fabrication processes that solve most deficiencies. We will also discuss "hybrid" imaging anaysthat many the advantages of CCD and CMOS, producing sensors with superior performance in comparison to CCD andCMOS bulk monolithic sensors. CCD to CMOS, CMOS to CMOS and CMOS 501 hybrids are reviewed.