Ultraviolet-Ozone Treatment for Effectively Removing Adhesive Residue on Graphene

Abstract

In this paper, we systematically investigated the influence of adhesive residue existing in deterministic transfer process upon graphene, and put forward a rapid and effective way named ultraviolet-ozone (UVO) treatment to reduce this negative effect. Results indicate that this adhesive residue may cause poor contact between metal and graphene, thus greatly degrading the performance of the device. However, this unpleasant influence could be reduced effectively by adopting UVO treatment. This work may be helpful to fabricate higher performance functional devices based on two-dimensional materials by removal of the adhesive residue.