Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method

Abstract

The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching. © 2006 American Institute of Physics.