CITATION STYLE
Chrastina, D., Rössner, B., Isella, G., von Känel, H., Hague, J. P., Hackbarth, T., … König, U. (2005). LEPECVD — A Production Technique for SiGe MOSFETs and MODFETs (pp. 17–29). https://doi.org/10.1007/1-84628-235-7_2
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