A laser fabrication of magnetic micromachines by using optimized photosensitive ferrofluids

Abstract

We report here a laser fabrication of magnetic micromachines by using optimized photosensitive ferrofluids. Fe3O4 nanoparticles were prepared by thermal decomposition and subsequent ligand exchange. And then, they were dispersed into photoresist. As a representative illustration, a magnetic microturbine with high surface flatness was fabricated, and its rotation speed could reach as high as 400 rpm under revolving magnetic field.