Experimental research on temperature characteristics of two-dimensional micro scanner

Abstract

Two-dimensional micro scanner which used for space laser detection is affected by the space environment. The scanning and piezoresistive measuring performances of the two-dimensional micro scanner are affected by the temperature change. In order to test the space temperature adaptability, the temperature characteristics of scanning and piezoresistive measuring performances are researched in this paper. According to the temperature change in space, the temprature effects on the scanning and piezoresistive measuring performances are measured in the range of -20°C to 80°C. The experimental results indicate that there are minor change in the two resonant frequencies and always linear relationships of the piezoresistive measuring results. The reasons of the effects on measuring sensitivity and linearity are analyzed and the optimal temperature range is presented. Through the temperature adaptation experiments, a basis of the temperature compensation and space application of the two-dimensional micro scanner is provided.