TOF MS Investigation of Nickel Oxide CVD

Abstract

NiO layers were deposited by metal-organic chemical vapor deposition using bis-(ethylcyclopentadienyl) nickel (EtCp) 2 Ni and oxygen or ozone. As a continuation of kinetic study of NiO MOCVD the gas-phase, transformations of (EtCp) 2 Ni were studied in the temperature range of 380–830 K. Time of reactions corresponding to the residence time of the gas stream in hot zone of the reactor was about 0.1 s under conditions studied. The interaction of (EtCp) 2 Ni with oxygen started at 450 K and its conversion rate reached the maximum at 700 K. The interaction of (EtCp) 2 Ni with ozone started at 400 K and its conversion rate reached the maximum at 600 K. Transformations of the gas phase with the temperature in the reaction zone were studied, the model reaction schemes illustrating (EtCp) 2 Ni transformations in the reaction systems containing oxygen and ozone have developed. In the reaction system (EtCp) 2 Ni–O 2 –Ar the main gas-phase products at 380–500 K were CO, CO 2 , HCO, C 2 H 5 OH, CpCOOH, and CpO. Formation of the C 2 H 2 O, C 3 H 4 O, and C 5 H 8 O was found at 630–830 K. The same gas-phase species, (C 4 H 3 O) 2 Ni and dialdehydes was formed in the reaction system (EtCp) 2 Ni–O 3 –O 2 –Ar. [Figure not available: see fulltext.].