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Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications

  • Xie H
  • Todd S
  • Jain A
  • et al.
Springer US, (2007), 1429-1471
DOI: 10.1007/0-387-25786-1_36
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Xie, H., Todd, S., Jain, A., & Fedder, G. K. (2007). Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications. In MEMS/NEMS (pp. 1429–1471). Springer US. https://doi.org/10.1007/0-387-25786-1_36

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