Development of mass spectrometer using two rotating electric fields for separation of high-mass ions

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Abstract

We developed a mass spectrometer with a novel mass-separation mechanism using two rotating electric fields (REFs). This mass spectrometer realizes a wide mass range with the continuous separation of ion beams. In principle, it has no limitation on the mass range. It can be operated stably for the detection of high-mass ions. To estimate the mass-separation ability, we directly introduced the mass spectrometer, which consists of two REFs, to a Ga focused ion beam column. The mass spectra of Ga isotopes were obtained by sweeping the frequencies of the REFs. The peaks of the Ga isotopes were clearly separated on the mass spectra.

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Anai, Y., Nojima, M., Hotta, M., Kurumi, S., Suzuki, K., Adachi, T., … Moritani, K. (2016). Development of mass spectrometer using two rotating electric fields for separation of high-mass ions. In e-Journal of Surface Science and Nanotechnology (Vol. 14, pp. 161–164). The Japan Society of Vacuum and Surface Science. https://doi.org/10.1380/ejssnt.2016.161

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