Abstract
… multimodal transmission line: it can propagate two fundamental quasi-TEM modes simultaneously (the even … Au are deposited by an electron beam gun, paterned and wet etched (Figure 7 … layer is removed by wet etching, and the suspended structures are released by removing …
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CITATION STYLE
APA
Pradell, L., Girbau, D., Ribó, M., Casals-Terré, J., Lázaro, A., Contreras, A., … Margesin, B. (2018). RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits. In MEMS Sensors - Design and Application. InTech. https://doi.org/10.5772/intechopen.76445
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