Development of a model for ultra-precise surface machining of N-BK7® using microwave-driven reactive plasma jet machining

Abstract

In this paper, extensive studies are conducted as key to overcoming several challenging limitations in applying fluorine-based reactive plasma jet machining (PJM) to surface machining of N-BK7®, particularly regarding the manufacture of freeform optical elements. The chemical composition and lateral distributions of the residual layer are evaluated by X-ray photoelectron spectroscopy and scanning electron microscopy/energy-dispersive X-ray spectroscopy analysis aiming at clarifying the exact chemical kinetics between plasma generated active particles and the N-BK7 surface atoms. Subsequently, a model is developed by performing static etchings to consider the time-varying nonlinearity of the material removal rate and estimate the local etching rate function. Finally, the derived model is extended into the dynamic machining process, and the outcomes are compared with the experimental results.