This paper presents the effect of residual stress on the response of the capacitive push pull accelerometer structure. The effect of residual stresses on the structure was simulated by using finite element method (FEM) based software. A simple model is proposed to trim the offset of the accelerometer deflection due to the residual stress associated with various fabrication processes.
CITATION STYLE
Gupta, N., Shaveta, Dutta, S., Pal, R., & Jain, K. K. (2019). Effect of residual stress on cantilever type push–pull capacitive accelerometer structure. In Springer Proceedings in Physics (Vol. 215, pp. 951–954). Springer Science and Business Media, LLC. https://doi.org/10.1007/978-3-319-97604-4_144
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