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Micro and nano fabrication: Tools and processes

Springer Berlin Heidelberg, (2015), 1-519
DOI: 10.1007/978-3-662-44395-8
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Abstract

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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Gatzen, H. H., Saile, V., & Leuthold, J. (2015). Micro and nano fabrication: Tools and processes. Micro and Nano Fabrication: Tools and Processes (pp. 1–519). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-44395-8

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