This paper investigated the response time, chloride selectivity, and temperature coefficients of the arrayed flexible ruthenium oxide chloride ion sensor in sodium chloride (NaCl) solutions with concentrations from 10 -5 M to 1 M. The response time was 7 s in 1 M NaCl solution at room temperature, showing that the sensor had the characteristics of the fast response. The selectivity coefficients of the SO 42- ion, NO 3- ion, CO 32- ion, ClO - ion, and ClO 4- ion were 0.001, 0.056, 0.004, 0.015, and 0.006, respectively. The chloride ion sensing device had the good chloride selectivity. Finally, the sensitivity was investigated with different solution temperatures from 5 °C to 50 °C. The sensitivity was increased with higher solution temperature. The temperature coefficient of the sensitivity of the chloride ion sensing device was approximately 0.681 mV/pCl °C between 5 °C and 35 °C.
CITATION STYLE
Tseng, S. C., Wu, T. Y., Chou, J. C., Liao, Y. H., Lai, C. H., Chen, J. S., … Lin, S. H. (2019). A Study on Selectivity and Temperature Coefficients of the Chloride Ion Sensors with RuO x Thin Film. IEEE Journal of the Electron Devices Society, 7, 134–139. https://doi.org/10.1109/JEDS.2018.2886300
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