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Micro/Nano Fabrication Technologies and Micro Flow Devices for Future Energy Devices

  • Shoji S
  • Ishizuka M
  • Sato H
  • et al.
DOI: 10.1007/978-1-4419-1424-8_5
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Shoji, S., Ishizuka, M., Sato, H., Arakawa, T., & Mizuno, J. (2010). Micro/Nano Fabrication Technologies and Micro Flow Devices for Future Energy Devices (pp. 49–64). https://doi.org/10.1007/978-1-4419-1424-8_5

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