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Nanomechanical Cantilever Array Sensors

  • Lang H
  • Hegner M
  • Gerber C
DOI: 10.1007/978-3-642-02525-9_15
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Abstract

Microfabricated cantilever sensors have attracted much interest in recent years as devices for the fast and reliable detection of small concentrations of molecules in air and solution. In addition to application of such sensors for gas and chemical-vapor sensing, for...

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Lang, H. P., Hegner, M., & Gerber, C. (2010). Nanomechanical Cantilever Array Sensors (pp. 427–452). https://doi.org/10.1007/978-3-642-02525-9_15

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