Single-shot optical surface profiling using extended depth of field 3D microscopy

Abstract

The measurement of three-dimensional samples at high speed is essential for many applications, either due to the requirement for measuring samples that change fast over time, or due to the requirement of reducing the scanning time, and therefore inspection cost, in industrial environments. Conventionally, the measurement of surface topographies at high resolution typically requires an axial scanning of the sample. We report the implementation of a technique able to reconstruct surface topographies at high resolution, only from the acquisition of a single camera shot, dropping the need to perform an axial scan. A system prototype is reported and assessed as an ultra-fast optical surface profiler. We propose robust calibration and operation methods and algorithms to reconstruct surface topographies of optically-rough samples, and compare the experimental results with a reference confocal optical profiler.