Precise control of configuration, size and density of self-assembled Au nanostructures on 4H-SiC (0001) by systematic variation of deposition amount, annealing temperature and duration

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Abstract

Precise control over the configuration, size and density of Au nanoparticles (NPs) has offered an efficient route to enhance and optimize the performance and usability of various NP-based applications. In this study we successfully demonstrate precise control of the configuration, size and density of self-assembled Au nanostructures on 4H-SiC (0001) via systematic variation of the deposition amount, annealing temperature and duration. Depending on the deposition amount at a fixed annealing temperature and duration, the self-assembled Au NPs are successfully fabricated based on the Volmer-Weber growth model, and the NPs nucleate as round dome shapes and evolve into hexagonal nano-crystals with facet formation along with the increased deposition amounts. For the variation of annealing temperature, the Au nanostructures radically develop into two distinct regimes: i.e. irregular Au nano-mounds (regime I) between 400 and 700 °C based on the diffusion limited agglomeration (DLA) model and round dome-shaped droplets (DPs) (regime II) between 750 and 1000 °C. The dwelling time, size and density evolution of the round dome-shaped Au DPs are discussed based on the Ostwald ripening theory.

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Li, M. Y., Sui, M., Pandey, P., Zhang, Q. Z., Kunwar, S., Salamo, G. J., & Lee, J. (2016). Precise control of configuration, size and density of self-assembled Au nanostructures on 4H-SiC (0001) by systematic variation of deposition amount, annealing temperature and duration. CrystEngComm, 18(19), 3347–3357. https://doi.org/10.1039/c5ce02439k

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