Effect of Shot Noise and Secondary Emission Noise in Scanning Electron Microscope Images

Abstract

The effect of shot noise and emission noise due to materials that have different emission properties was simulated. Local variations in emission properties affect the overall signal-to-noise ratio (SNR) value of the scanning electron microscope image. In the case in which emission noise is assumed to be absent, the image SNRs for silicon and gold on a black background are identical. This is because only shot noise in the primary beam affects the SNRs, irrespective of the assumed noiseless secondary electron emission or backscattered electron emission processes. The addition of secondary emission noise degrades the SNR. Materials with higher secondary electron yield and backscattering electron yield give rise to higher SNR. For images formed from two types of material, the contrast of the image is lower. The reduction in image signal reduces the overall image SNR. As expected, large differences in δ or η give rise to higher SNR images.