Nanotube micro-optomechanical actuators

Abstract

In this letter we demonstrate a simple carbon nanotube patterning technique that combines nanotube film bonding, photolithography, and O 2 plasma etching. Well defined carbon nanotube film structures with line widths less than ∼1.5 μm and thickness ranging from 40 to 780 nm were readily fabricated. A micro-optomechanical actuator based on this process has been demonstrated. This patterning process can be utilized for the integration of nanomaterials for wide variety of devices including microeletromechanical systems, field emission displays, and micro-optomechanical systems (MOMS). © 2006 American Institute of Physics.