3D mesh generation for the results of anisotropic etch simulation

Abstract

The paper is devoted to the development of 3D mesh generator that provides the interface between etch simulation tool of IntelliSuite™ CAD for MEMS™ and its analyses compounds. Paper gives a brief introduction to IntelliSuite and its anisotropic etch simulator. The rest of the paper is devoted to the algorithm of 3D mesh generation based on special requirements to Finite Element Mesh. This algorithm can be divided into two main stages: manual 2D meshing of the upper surface and automatic 3D mesh generation for simplified object obtained from the previous stage. Paper contains the detailed description of both stages of the algorithm. © 2002 Springer-Verlag Berlin Heidelberg.