X-ray Nano- and Micro-tomography in an SEM

Abstract

X-ray microfocus computer tomography (μ-CT) is a non-destructive experimental technique that reveals the 3D internal microstructure of the sample under study. The experimental set-up consists of an X-ray source, an X-ray detector, and set in between is a sample that is placed on a rotation stage. With this set-up multiple X-ray projection images can be obtained from the sample at different angles. In between the acquisition of two successive images, the sample is rotated over a small angle, typically between 0.2° and 1°. This set of projection images is then used as input for the reconstruction algorithm, which calculates a reconstruction of the internal microstructure of the sample with (sub-) micrometer sensitivity.