Applying data mining techniques to wafer manufacturing

Abstract

In this paper we report an experience from the use of data mining techniques in the area of semiconductor fabrication. The specific application we dealt with is the analysis of data concerning the wafer production process with the goal of determining possible causes for errors, resulting in lots of faulty wafers. Even though our application is very specific and deals with a specific manufacturing sector (e.g. semiconductor fabrication), we believe that our experience can be relevant to other manufacturing sectors and provide significant feedback on the use of data mining techniques.