Abstract
Synopsis Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.
Cite
CITATION STYLE
Khreis, J., Ameixa, J., Neustetter, M., Reitshammer, J., Ferreira Da Silva, F., & Denifl, S. (2017). Low-energy electron interactions with chromium hexacarbonyl Cr(CO)6. In Journal of Physics: Conference Series (Vol. 875). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/875/7/062003
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