Three-dimensional electron diffraction mapping for cyclic twinned nanostructures

Abstract

In recent years, the information retrieval of three-dimensional (3D) intensity distribution in reciprocal space has attracted much attention in nanometrology research. However, the development of 3D analysis of electron diffraction intensity including crystal structural identification and morphology determination of nanocrystals have so far focused on single crystalline nano-objects. Using boron carbide five-fold twinned nanowires as a model system for nanostructured nano-objects, we demonstrated that such method can also identify the internal structure of cyclic twinned nanostructures. Here, the methodology of the 3D mapping of electron diffraction from such nanowires will be presented and the approach is compared with the conventional method of axial rotation electron diffraction analysis to demonstrate its comprehensive, quantitative and non-destructive nature. We believe that such approach can be easily extended to the investigation of internal structures of other polycrystalline nanostructures. © Published under licence by IOP Publishing Ltd.