Quantum effect-based flexible and transparent pressure sensors with ultrahigh sensitivity and sensing density

Abstract

Although high-performance flexible pressure sensors have been extensively investigated in recent years owing to their diverse applications in biomedical and information technologies, fabricating ultrasensitive sensors with high pixel density based on current transduction mechanisms still remains great challenging. Herein, we demonstrate a design idea based on Fowler-Nordheim tunnelling effect for fabrication of pressure sensors with ultrahigh sensitivity and sensing density by spin-coating extremely low urchin-like hollow carbon spheres (less than 1.5 wt.%) dispersed in polydimethylsiloxane, which is distinct from the current transduction mechanisms. This sensor exhibits an ultrahigh sensitivity of 260.3 kPa−1 at 1 Pa, a proof-of-concept demonstration of a high sensing density of 400 cm−2, high transparency and temperature noninterference. In addition, it can be fabricated by an industrially viable and scalable spin-coating method, providing an efficient avenue for realizing large-scale production and application of ultrahigh sensitivity flexible pressure sensors on various surfaces and in in vivo environments.