Comment on: Characterization of microroughness parameters in titanium nitride thin films grown by DC magnetron sputtering [J fusion energ DOI 10.1007/s10894-012-9510-z]

Abstract

In recent article [Ali Gelali. Azin Ahmadpourian. Reza Bavadi. M. R. Hantehzadeh. Arman Ahmadpourian. J Fusion Energ DOI 10.1007/s10894-012-9510-z], Ali Geleli et al. studied the PSD andRMSRoughness parameters in Titanium Nitride thin films by AFM data and used the computed fractal dimension value of micrographs to describe the surface morphology of thin films. Here, the correct form of equations and relationship between PSD and RMS will be discussed. © Springer Science+Business Media, LLC 2012.