Gas Safety for TFT-LCD Manufacturing

Abstract

The fabrication of TFT-LCD panel includes the growing and etching of a-silicon and silicon nitride films. These fabrication processes utilize significant amounts of silane, phosphine, ammonia, chlorine, boron trichloride, nitrogen trifluoride, fluorine, and hydrogen which are highly flammable, reactive, corrosive, and/or toxic. The amount used and scale of the supply system for these gases are far larger than for other tech industries such as the semiconductor and photovoltaic industries. Accidental leaks and fires of these gases are the major safety concern in the TFT-LCD fabs. This paper first reviews the hazardous properties of the gases used in the TFT-LCD manufacturing processes. The best practices for handling these hazardous gases are then described. Finally, the past incidents and emergency response actions are also reviewed.