Design and simulation of piezoresistive polymer accelerometer

Abstract

The present work reports the optimization of SU-8/CB nanocomposite piezoresistive polymer based accelerometer. The designs presented in this paper consist of a proof mass with cantilevers supporting it. The piezoresistors are placed near fixed ends on the cantilevers. The main motive of designs is to obtain High sensitivity and reduced cross axis sensitivity, which is important aspect for cost effective accelerometer. The simulations show the von Misses stress, displacement change and sensitivity of the piezoresistors using ANSYS APDL v.12 commercial software. The results showed high sensitivity of about 0.59% under 10 g application.