Sampled waveform measurement in integrated circuits using heterodyne electrostatic force microscopy

Abstract

A high-resolution noncontact scanned probe technique has been developed for sampling the internal signals of an operating integrated circuit. The signal waveform is extracted by sensing the localized electrostatic force between a small probe and point on the circuit being measured. A heterodyne approach is used to enable the sampled measurement of high-frequency digital or analog waveforms. In conjunction with a nulling method, the technique is capable of accurate signal measurement without complex calibration or probe positioning, and can be performed over passivated structures. Measurement of digital and analog signals is demonstrated with a voltage accuracy of less than 100 mV.