Stretchable electronics need stretchable wiring membranes that are equivalent to printed wiring boards but with elastically stretchable insulators and multilevel metallization. We have developed technology for elastically stretchable two-level metallization on an elastomeric membrane. Two levels of conductors were separated by a photopatternable elastomeric dielectric and connected through via holes. They were evaluated at uniaxial tensile strains of up to 30% and then used to create an elastomeric resistor-inductor-capacitor (RLC) circuit, whose alternating-current (AC) response was measured at biaxial tensile strains of up to 6%. We describe the fabrication process, morphology, and electrical performance of the bilevel metallization and the RLC circuit. © 2011 TMS.
CITATION STYLE
Harris, J., Graudejus, O., & Wagner, S. (2011). Elastically stretchable insulation and bilevel metallization and its application in a stretchable RLC circuit. Journal of Electronic Materials, 40(6), 1335–1344. https://doi.org/10.1007/s11664-011-1613-1
Mendeley helps you to discover research relevant for your work.